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UV Debonding Machine (UVLED)
Desktop UVLED Debonding Machine
> High-speed debonding, 3~5 seconds/piece
> 8"/12" Wafer
> UVLED light source, availability in time, save energy and environmental protection
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UV 254nm Erasing Mercury Lamp
> Cold Cathode Fluorescent Lamp, long working life of lamp.
> Fence type design has high uniformity of irradiation.
> The lamps can increase the irradiation area and the uniformity.
> Ozone Free Design.
> Easy to Replace Lamp.
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Automatic Wafer Erasing / Surface Modification for 8-inch / 12-inch Wafer
> 254nm non-contact light wave irradiation, no arc damage wafer circuit problem.
> Adopt high-power (350W500W) tube, high 254nm illumination, high ERASE efficiency.
> The grid-type lamps are connected in parallel, with high uniformity of irradiation.
> No ozone problems / no heat emission from the factory.
> High operation safety (light leakage prevention / drawer accidentally turn on and off lights).
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Desktop UV Wafer Erasing / Surface Modification for 12 inch 6 wafers / 8 inch 15 wafers
> 254nm non-contact light wave irradiation, no arc damage wafer circuit problem.
> Adopt high-power (350W500W) tube, high 254nm illumination, high ERASE efficiency.
> The grid-type lamps are connected in parallel, with high uniformity of irradiation.
> No ozone problems / no heat emission from the factory.
> High operation safety (light leakage prevention / drawer accidentally turn on and off lights).
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UV Wafer Erasing/ Surface Modification for 8-inch / 12-inch wafer single pcs wafer
> 254nm non-contact light wave irradiation, no arc damage wafer circuit problem.
> Adopt high-power (350W500W) tube, high 254nm illumination, high ERASE efficiency.
> The grid-type lamps are connected in parallel, with high uniformity of irradiation.
> No ozone problems / no heat emission from the factory.
> High operation safety (light leakage prevention / drawer accidentally turn on and off lights).
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Wafer UV Photoresist Curing Machine
> The design of the reflected light path of each lamp tube, the uniformity of the illumination at 5 points with a diameter of 300mm and more than 80%.
> Anti-light leakage safety design, no light leakage after the double-open gate is closed.
> Illumination monitoring design, which can dynamically monitor illuminance during production.
> Modular design of irradiation light box, can be used with current EFEM system.
> PC BASE MMI interface, A. production statistics management list, B. lamp illuminance / life management list.
Products
- Inkjet Printer/ Industral High Precision
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Handheld Inkjet Printer
- UVLED/Near IR/Sintering/254nm Erasing
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UVSeeing/ Spectral Irradiance Meter
- Conductive/Insulation Materials
- InfiRay 雷射/紅外熱像測距監控
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ASKION LRF/ Laser Range Finder
- Turbo Pump/ Vacuum Parts
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Optical Thickness Measurement System
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ARS/Angle Resolved Scattering
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DVC/ Dip-sag Voltage Compensator
others
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Links
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