Wafer UV Photoresist Curing Machine

> The design of the reflected light path of each lamp tube, the uniformity of the illumination at 5 points with a diameter of 300mm and more than 80%.

> Anti-light leakage safety design, no light leakage after the double-open gate is closed.

> Illumination monitoring design, which can dynamically monitor illuminance during production.

> Modular design of irradiation light box, can be used with current EFEM system.

> PC BASE MMI interface, A. production statistics management list, B. lamp illuminance / life management list.